The Structural and Electrical Properties of Nanostructures ZnO Thin Films on Flexible Substrate
Zinc oxide (ZnO) thin films were deposited on Teflon substrates by radio frequency (RF) magnetron sputtering method at different substrate temperature. The dependence of residual stress on the substrate temperature was investigated in this work due to the growth process, the bombardment of energetic particles and process heating to the deposited thin films. From field emission scanning electron microscope (FESEM) images, samples that deposited at various substrate temperatures consists nano-sized particles. The obtained X-ray diffraction (XRD) results, it suggested that ZnO thin film deposited at 40oC with highly c-axis oriented shows unstressed film compared to other thin films. Besides that, the ZnO thin films deposited at 40oC shows improved electrical properties.
ZnO thin films; substrate temperatures; Teflon substrate; RF magnetron sputtering
Published by INSIGHT - Indonesian Society for Knowledge and Human Development